Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik Microwave
Technology and Optoelectronics Research www.fbh-berlin.de
Fraunhofer IPK - Institute for Production
Systems and Design Technology www.ipk.fhg.de
Fraunhofer IZM - Institute for Reliability
and Microintegration www.izm.fhg.de
Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (HZB) Institute for Nanometre Optics and Technology www.azm.bessy.de
TUB - Technical University Berlin -
Departments of Machine Tools and Factory Management, Precision Engineering and Microtechnology www.mfg.tu-berlin.de